2024年4月22日发(作者：肥永元)
专利内容由知识产权出版社提供
专利名称：Wafer Cassette, Wafer Cassette Pod and
Minienvironment Chamber Loadport
Arrangement with a Minienvironment
Chamber and a Wafer Cassette Pod with a
Wafer Cassette
发明人：Michael Lering
申请号：US11757838
申请日：20070604
公开号：US2A1
公开日：20081204
专利附图：
摘要：Exemplary embodiments of the invention relate to a wafer cassette, to a wafer
cassette pod and to a minienvironment chamber loadport arrangement with a
minienvironment chamber and a wafer cassette pod. In one exemplary embodiment of
the invention, a wafer cassette is provided which has a plurality of wafer supports for
supporting wafers, with the wafer supports being designed such that the pitch between
wafers supported by means of the wafer supports is variable.
申请人：Michael Lering
地址：Dresden DE
国籍：DE
更多信息请下载全文后查看
2024年4月22日发(作者：肥永元)
专利内容由知识产权出版社提供
专利名称：Wafer Cassette, Wafer Cassette Pod and
Minienvironment Chamber Loadport
Arrangement with a Minienvironment
Chamber and a Wafer Cassette Pod with a
Wafer Cassette
发明人：Michael Lering
申请号：US11757838
申请日：20070604
公开号：US2A1
公开日：20081204
专利附图：
摘要：Exemplary embodiments of the invention relate to a wafer cassette, to a wafer
cassette pod and to a minienvironment chamber loadport arrangement with a
minienvironment chamber and a wafer cassette pod. In one exemplary embodiment of
the invention, a wafer cassette is provided which has a plurality of wafer supports for
supporting wafers, with the wafer supports being designed such that the pitch between
wafers supported by means of the wafer supports is variable.
申请人：Michael Lering
地址：Dresden DE
国籍：DE
更多信息请下载全文后查看