2024年2月22日发(作者：藏清宁)
Varian, Technologies NEWHigh PerformanceMini-TASK AG81
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
/chem.
NEW High Performance Mini-TASK AG81The NEw Mini-TASK AG81 (Active Gauge)
is a portable, fully-integrated pumping
system powered by the Varian Turbo-V 81
MacroTorr® turbomolecular pump backed
by a 10 l/min diaphragm pumpct,
apmCoum
ucale
Vbatlug
rP
Pots:
JumetsSympuP
danTurbo-V 81-M: improved
vacuum performanceThe Turbo-V 81-M is a high performanceturbo-drag pump with improved
mechanical design aimed at:• Higher foreline pressure tolerance• Higher pumping speed and throughput• Excellent compression ratioUnique Varian Turbo
Pump Technology• No maintenance required: Varian
Turbo Pumps don't need oil refills
• Operability in any position• Low Power Requirement (optimized
by new generation controller)Reading Card and
new Generation Controller• Large Pressure Reading Display
• 90-240V, 50/60 Hz• I/O and serial interface• T-Plus Navigator Software allows communication with your PCActive Gauge Capability• The new generation electronics allows full control
of the Varian Mini-IMG high vacuum gauge
• The Mini-IMG (based on the inverted magnetron ion gauge
technology) has an operation range from 1.3x10-3 mbar
(1x10-3 Torr) to 2.6x10-9 mbar (2x10-9 Torr)
• Operating temperature tolerance from 0°C to 50°C
(32° - 122° F)
• Pressure data available on three independent channels: - On-board display in Torr, Pascal and mbar options - Serial communication - Analog output• Pressure gauge can be connected/disconnected from the
Mini-TASK AG81 during normal operationWorld-wide Service and Support• Global network of professional sales and application engineers• Toll free telephone lines with native
language representatives
• Technical/Application/Order Processing/ Engineering Support• Worldwide Repair, Advance Exchange
and Upgrade programs availableVarian, Inc. Vacuum Technologies
Features and BenefitsFeatures• New Generation Turbomolecular Pump Turbo-V 81-M• Compact, Light, Dry, Clean and Robust System• Universal voltage (90V/240V) - CE/CSA certified• RS-232 or Analogical Communication• High vacuum gauge driving card• Large pressure data display• Pressure driven set point, Analog set pointBenefits• Designed for demanding applications• Cost-effective pumping solution for small volumes• Can be used world-wide• Easy to use: plug and play system• Compatible with world-wide power configurations• Complies with world-wide safety standards• Easy system pressure measurementMini-IMG Active Gauge
Active Inverted Magnetron Transducer1x10-3 Torr to 2x10-9 Torr1.3x10-3 mbar to 2.6x10-9 mbar• Compact, stand-alone transducer• Simple, rugged electronic with metal enclosure• LED status indicator• CSA/UL and CE certified
Mini-IMG Active Gauge Kit
This accessory can be ordered separately, and includes:• Mini-IMG Active Gauge• Cable for gauge connection,• Vacuum Tee and Connecting Hardware
(Flanges according to the System inlet flange)Varian, Inc. Vacuum Technologies
Technical Specifications and Ordering Information
PumPing SPeed VS inlet PreSSure7060PreSSure VS time
(with a pump down vol. of 1 lt.)1,0E+031,0E+02Pressure
(mbar)65430E-020E-010E-070E-00E-00E-00E-0501,0E+011,0E+001,0E-011,0E-021,0E-031,0E-04Inlet
pressure4030201000E-01,1,1,1,1,1,1,1,1,0E-180Pumping speed (l/s)Time (sec)teChniCal SPeCifiCationS
Pumping Speed (l/s)
Base pressure
Bakeout temperature
Shipping Weight lbs. (kg)
Pumpdown time (1 liter volume)
Turbo pump rotational speed
Start-up time
Operating position
Operating ambient temperature
Input Voltage and Frequency
Maximum input power
Serial communications
N2
H2
He
KF40
40
36
45
2 x 10-7 mbar
80 °C at inlet
16.4 (7.5)
ISO63
60
40
55
2 x 10-7 mbar
80 °C at inlet
16.4 (7.5)
CFF 4.5 in.
60
40
55
5 x 10-8 mbar*120 °C at inlet18.3 (8.3)60 sec. to 24 mbar; 120 sec. to 1 x 10-4 mbar; 160 sec. to 7 x 10-5 mbar80,000 rpmLess than 2 minutesAny5 °C to 35 °C / 32 °F to 122 °F90V to 240V AC; 50 Hz / 60 Hz220 VARS-232 cable, 9-pin D-type male, 9-pin D-type female, T-Plus Navigator Software*NOTE: According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out, with
a Turbopump fitted with a ConFlat Flangeordering information
Mini-TASK AG81
Gauge Kit
EU plug power cable, 2 meters (1 ph)
USA plug power cable 2 meters (1 ph)
UK plug power cable 2 meters (1 ph)
Serial Cable and T-Plus Navigator Software
KF40
9699180
9699185
9699396
9699397
9699398
9699883
ISO63
9699181
9699186
9699396
9699397
9699398
9699883
CFF 4.5in9699699396969939796993989699883Varian, Inc. Vacuum Technologies
Applications
FSBA
:ysetruoCretniG
retPe
/
CLAS
:ysetruoCSCINOVO
:ysetruoCNOTRXIA
:ysetruoCElectron Microscopy and Mass SpectrometryThe new Mini-TASK AG81 Integrated Turbo Pumping
System is the perfect tool to keep the column of an
electron microscope under vacuum while performing
maintenance or repair on the oil-free nature of the system guarantees freedom
from contamination of the Energy Physics and Research CentersThis new Turbo Pumping System may be used in any
laboratory where there is a need to create high vacuum
in small-volume chambers quickly and easily. It performs
best when evacuating volumes of 10 liters or new generation electronics and the pressure display
ensure the accuracy of the nductor ManufacturingThe Mini-TASK AG81 is particularly well suited for
evacuating load-lock chambers. Its oil-free design ensures
the purity of the Mini-TASK AG81 may be mounted in any position,
making it suitable for most system rial ApplicationsThe Mini-TASK AG81 Turbo Pumping System can create
and maintain the required vacuum level in separate
chamber of an industrial system during maintenance
or repair.
Outline Drawing
KF 40CFF 4.5 63]42]].46159[55.5
83.913[1[.
1
688345..444433]48.9[
00.052Mini-TASKAG81162.00 [6.38]250.00 [9.84]
162.00 [6.38]Dimensions: millimeters [inches]Varian, Inc. Vacuum TechnologiesUnited States and CanadaFranceJapanSingaporeVarian, Inc
Varian Technologies Japan, Vacuum Technologies Singapore121 Hartwell Avenue7 avenue des TropiquesSumitomo Shibaura Building, 8th FloorUnit 10-04 HeliosLexington, MA 02421, USAZ.A. de Courtaboeuf - B.P. 124-16-36 Shibaura Minato-kuBiopolis @ one-northTel.: +1 781 861 720091941 Les Ulis cedex, FranceTokyo 108, JapanToll-Free: +1 800 882 7426Tel.: +33 (0) 1 69 86 38 84Tel.: +81 3 5232 125311 Biopolis Way, 138667 SingaporeFax: +1 781 860 5437Fax: +33 (0) 1 69 86 29 88Toll-Free: 0120 655 040H/P.: +65 92364988***************************************************************Fax: +81 3 5232 1710Fax: +65 64789603BeneluxGermany and Austria***************************************************Varian Vacuum TechnologiesVarian Deutschland GmbHKoreaTaiwanHerculesweg 8Alsfelder Strasse 6, Postfach 11 14 35Varian Technologies Korea, Technologies Asia, Ltd.4338 PL Middelburg, The Netherlands64289 Darmstadt, GermanyShinsa 2nd Bldg. 2F - 966-5 Daechi-dong14F-6, No. 77, Hsin Tai Wu Road, Sec. 1Tel.: +31 118 671570Tel.: +49 (0) 6151 703 353Kangnam-gu, Seoul, Korea 135-280Hsi chih, Taipei Hsien, Taiwan, : +31 118 671569Fax: +49 (0) 6151 703 302Tel.: +82 2 3452 2452Tel.: +886 2 2698 9555****************************************************Toll-Free: 080 222 2452Toll Free: 0800 051 342**************************IndiaFax: +82 2 3452 2451Fax: +886 2 2698 9678ChinaVarian India Pvt. Ltd.***********************************UK and IrelandVarian Technologies China, Ltd.205-A, “A” wing of Galleria,MexicoVarian 1648, Central Tower South Wing2nd floor, Hiranandani Gardens,Varian, S. de R.L. de C.V.6 Mead Road, Oxford Industrial ParkBeijing Junefield PlazaPowai, Mumbai-400 076, IndiaConcepcion Beistegui No 109Yarnton, Oxford OX5 1QU, UKNo. 10 XuanWuMenWai StreetTel.: +91 22-2570 8595 / 8597Col Del Valle, C.P. 03100, Mexico, .: +44 (0) 1865 291570Beijing 100052, P. R. ChinaFax: +91 22- 2570 8599Tel.: +52 5 523 9465Fax: +44 (0) 1865 291571Tel.: +86 (10) 6310 8550Fax: +52 5 523 9472*****************************Toll-Free: 800 820 6556Italy*****************************Fax: +86 (10) 6310 0141Varian, Inc. - via Varian 54***********************************10040 Leini, (Torino), ItalySouth East AsiaTel.: +39 011 997 9111Varian Vacuum Technologies South East
Toll-Free: 00 800 234 234 00Asia (SEA) - Alex HoFax: +39 011 997 9350H/P.: +601 2213 1253**********************************Fax: +603 6733 8121**************************************************All specifications are subjectto change without ght by Varian /vacuum80neG
-
OIFFARG
2024年2月22日发(作者：藏清宁)
Varian, Technologies NEWHigh PerformanceMini-TASK AG81
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
/chem.
NEW High Performance Mini-TASK AG81The NEw Mini-TASK AG81 (Active Gauge)
is a portable, fully-integrated pumping
system powered by the Varian Turbo-V 81
MacroTorr® turbomolecular pump backed
by a 10 l/min diaphragm pumpct,
apmCoum
ucale
Vbatlug
rP
Pots:
JumetsSympuP
danTurbo-V 81-M: improved
vacuum performanceThe Turbo-V 81-M is a high performanceturbo-drag pump with improved
mechanical design aimed at:• Higher foreline pressure tolerance• Higher pumping speed and throughput• Excellent compression ratioUnique Varian Turbo
Pump Technology• No maintenance required: Varian
Turbo Pumps don't need oil refills
• Operability in any position• Low Power Requirement (optimized
by new generation controller)Reading Card and
new Generation Controller• Large Pressure Reading Display
• 90-240V, 50/60 Hz• I/O and serial interface• T-Plus Navigator Software allows communication with your PCActive Gauge Capability• The new generation electronics allows full control
of the Varian Mini-IMG high vacuum gauge
• The Mini-IMG (based on the inverted magnetron ion gauge
technology) has an operation range from 1.3x10-3 mbar
(1x10-3 Torr) to 2.6x10-9 mbar (2x10-9 Torr)
• Operating temperature tolerance from 0°C to 50°C
(32° - 122° F)
• Pressure data available on three independent channels: - On-board display in Torr, Pascal and mbar options - Serial communication - Analog output• Pressure gauge can be connected/disconnected from the
Mini-TASK AG81 during normal operationWorld-wide Service and Support• Global network of professional sales and application engineers• Toll free telephone lines with native
language representatives
• Technical/Application/Order Processing/ Engineering Support• Worldwide Repair, Advance Exchange
and Upgrade programs availableVarian, Inc. Vacuum Technologies
Features and BenefitsFeatures• New Generation Turbomolecular Pump Turbo-V 81-M• Compact, Light, Dry, Clean and Robust System• Universal voltage (90V/240V) - CE/CSA certified• RS-232 or Analogical Communication• High vacuum gauge driving card• Large pressure data display• Pressure driven set point, Analog set pointBenefits• Designed for demanding applications• Cost-effective pumping solution for small volumes• Can be used world-wide• Easy to use: plug and play system• Compatible with world-wide power configurations• Complies with world-wide safety standards• Easy system pressure measurementMini-IMG Active Gauge
Active Inverted Magnetron Transducer1x10-3 Torr to 2x10-9 Torr1.3x10-3 mbar to 2.6x10-9 mbar• Compact, stand-alone transducer• Simple, rugged electronic with metal enclosure• LED status indicator• CSA/UL and CE certified
Mini-IMG Active Gauge Kit
This accessory can be ordered separately, and includes:• Mini-IMG Active Gauge• Cable for gauge connection,• Vacuum Tee and Connecting Hardware
(Flanges according to the System inlet flange)Varian, Inc. Vacuum Technologies
Technical Specifications and Ordering Information
PumPing SPeed VS inlet PreSSure7060PreSSure VS time
(with a pump down vol. of 1 lt.)1,0E+031,0E+02Pressure
(mbar)65430E-020E-010E-070E-00E-00E-00E-0501,0E+011,0E+001,0E-011,0E-021,0E-031,0E-04Inlet
pressure4030201000E-01,1,1,1,1,1,1,1,1,0E-180Pumping speed (l/s)Time (sec)teChniCal SPeCifiCationS
Pumping Speed (l/s)
Base pressure
Bakeout temperature
Shipping Weight lbs. (kg)
Pumpdown time (1 liter volume)
Turbo pump rotational speed
Start-up time
Operating position
Operating ambient temperature
Input Voltage and Frequency
Maximum input power
Serial communications
N2
H2
He
KF40
40
36
45
2 x 10-7 mbar
80 °C at inlet
16.4 (7.5)
ISO63
60
40
55
2 x 10-7 mbar
80 °C at inlet
16.4 (7.5)
CFF 4.5 in.
60
40
55
5 x 10-8 mbar*120 °C at inlet18.3 (8.3)60 sec. to 24 mbar; 120 sec. to 1 x 10-4 mbar; 160 sec. to 7 x 10-5 mbar80,000 rpmLess than 2 minutesAny5 °C to 35 °C / 32 °F to 122 °F90V to 240V AC; 50 Hz / 60 Hz220 VARS-232 cable, 9-pin D-type male, 9-pin D-type female, T-Plus Navigator Software*NOTE: According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out, with
a Turbopump fitted with a ConFlat Flangeordering information
Mini-TASK AG81
Gauge Kit
EU plug power cable, 2 meters (1 ph)
USA plug power cable 2 meters (1 ph)
UK plug power cable 2 meters (1 ph)
Serial Cable and T-Plus Navigator Software
KF40
9699180
9699185
9699396
9699397
9699398
9699883
ISO63
9699181
9699186
9699396
9699397
9699398
9699883
CFF 4.5in9699699396969939796993989699883Varian, Inc. Vacuum Technologies
Applications
FSBA
:ysetruoCretniG
retPe
/
CLAS
:ysetruoCSCINOVO
:ysetruoCNOTRXIA
:ysetruoCElectron Microscopy and Mass SpectrometryThe new Mini-TASK AG81 Integrated Turbo Pumping
System is the perfect tool to keep the column of an
electron microscope under vacuum while performing
maintenance or repair on the oil-free nature of the system guarantees freedom
from contamination of the Energy Physics and Research CentersThis new Turbo Pumping System may be used in any
laboratory where there is a need to create high vacuum
in small-volume chambers quickly and easily. It performs
best when evacuating volumes of 10 liters or new generation electronics and the pressure display
ensure the accuracy of the nductor ManufacturingThe Mini-TASK AG81 is particularly well suited for
evacuating load-lock chambers. Its oil-free design ensures
the purity of the Mini-TASK AG81 may be mounted in any position,
making it suitable for most system rial ApplicationsThe Mini-TASK AG81 Turbo Pumping System can create
and maintain the required vacuum level in separate
chamber of an industrial system during maintenance
or repair.
Outline Drawing
KF 40CFF 4.5 63]42]].46159[55.5
83.913[1[.
1
688345..444433]48.9[
00.052Mini-TASKAG81162.00 [6.38]250.00 [9.84]
162.00 [6.38]Dimensions: millimeters [inches]Varian, Inc. Vacuum TechnologiesUnited States and CanadaFranceJapanSingaporeVarian, Inc
Varian Technologies Japan, Vacuum Technologies Singapore121 Hartwell Avenue7 avenue des TropiquesSumitomo Shibaura Building, 8th FloorUnit 10-04 HeliosLexington, MA 02421, USAZ.A. de Courtaboeuf - B.P. 124-16-36 Shibaura Minato-kuBiopolis @ one-northTel.: +1 781 861 720091941 Les Ulis cedex, FranceTokyo 108, JapanToll-Free: +1 800 882 7426Tel.: +33 (0) 1 69 86 38 84Tel.: +81 3 5232 125311 Biopolis Way, 138667 SingaporeFax: +1 781 860 5437Fax: +33 (0) 1 69 86 29 88Toll-Free: 0120 655 040H/P.: +65 92364988***************************************************************Fax: +81 3 5232 1710Fax: +65 64789603BeneluxGermany and Austria***************************************************Varian Vacuum TechnologiesVarian Deutschland GmbHKoreaTaiwanHerculesweg 8Alsfelder Strasse 6, Postfach 11 14 35Varian Technologies Korea, Technologies Asia, Ltd.4338 PL Middelburg, The Netherlands64289 Darmstadt, GermanyShinsa 2nd Bldg. 2F - 966-5 Daechi-dong14F-6, No. 77, Hsin Tai Wu Road, Sec. 1Tel.: +31 118 671570Tel.: +49 (0) 6151 703 353Kangnam-gu, Seoul, Korea 135-280Hsi chih, Taipei Hsien, Taiwan, : +31 118 671569Fax: +49 (0) 6151 703 302Tel.: +82 2 3452 2452Tel.: +886 2 2698 9555****************************************************Toll-Free: 080 222 2452Toll Free: 0800 051 342**************************IndiaFax: +82 2 3452 2451Fax: +886 2 2698 9678ChinaVarian India Pvt. Ltd.***********************************UK and IrelandVarian Technologies China, Ltd.205-A, “A” wing of Galleria,MexicoVarian 1648, Central Tower South Wing2nd floor, Hiranandani Gardens,Varian, S. de R.L. de C.V.6 Mead Road, Oxford Industrial ParkBeijing Junefield PlazaPowai, Mumbai-400 076, IndiaConcepcion Beistegui No 109Yarnton, Oxford OX5 1QU, UKNo. 10 XuanWuMenWai StreetTel.: +91 22-2570 8595 / 8597Col Del Valle, C.P. 03100, Mexico, .: +44 (0) 1865 291570Beijing 100052, P. R. ChinaFax: +91 22- 2570 8599Tel.: +52 5 523 9465Fax: +44 (0) 1865 291571Tel.: +86 (10) 6310 8550Fax: +52 5 523 9472*****************************Toll-Free: 800 820 6556Italy*****************************Fax: +86 (10) 6310 0141Varian, Inc. - via Varian 54***********************************10040 Leini, (Torino), ItalySouth East AsiaTel.: +39 011 997 9111Varian Vacuum Technologies South East
Toll-Free: 00 800 234 234 00Asia (SEA) - Alex HoFax: +39 011 997 9350H/P.: +601 2213 1253**********************************Fax: +603 6733 8121**************************************************All specifications are subjectto change without ght by Varian /vacuum80neG
-
OIFFARG