2024年3月17日发(作者：秘量)
10.1
Example – Silicon Spiral Inductor
The Silicon Spiral Inductor
This example is intended to show you how to create, simulate, and analyze a 2.5
turn spiral inductor using the Ansoft HFSS Design Environment.
Nominal Design:
Spiral: 2.5T, W=15um, S=1.5um, Rad=60um
M6, 2um, = 2.8e7 S/m
Underpass: M5, 0.5um, = 2.8e7 S/m
Stackup:
Passivation: 0.7um
Passivation
Oxide
M6
M5
r = 7.9
Oxide: 9.8um
r = 4.0
Substrate: 300um
r = 11.9, = 10 S/m
Ansoft High Frequency Structure Simulator v9 User’s Guide
Substrate
10.1-1
10.1
Example – Silicon Spiral Inductor
Getting Started
Launching Ansoft HFSS
1.
To access Ansoft HFSS, click the Microsoft Start button, select Programs, and
select the Ansoft > HFSS 9 program group. Click HFSS 9.
To set the tool options:
Note: In order to follow the steps outlined in this example, verify that the
following tool options are set :
1.
Select the menu item
Tools > Options > HFSS Options
2.
HFSS Options Window:
1.
Click the General tab
Use Wizards for data entry when creating new boundaries:
Checked
Duplicate boundaries with geometry: Checked
2.
Click the OK button
3.
Select the menu item
Tools > Options > 3D Modeler Options.
4.
3D Modeler Options Window:
1.
Click the Operation tab
Automatically cover closed polylines: Checked
2.
Click the Drawing tab
Edit property of new primitives: Checked
3.
Click the OK button
Setting Tool Options
Ansoft High Frequency Structure Simulator v9 User’s Guide
10.1-2
2024年3月17日发(作者：秘量)
10.1
Example – Silicon Spiral Inductor
The Silicon Spiral Inductor
This example is intended to show you how to create, simulate, and analyze a 2.5
turn spiral inductor using the Ansoft HFSS Design Environment.
Nominal Design:
Spiral: 2.5T, W=15um, S=1.5um, Rad=60um
M6, 2um, = 2.8e7 S/m
Underpass: M5, 0.5um, = 2.8e7 S/m
Stackup:
Passivation: 0.7um
Passivation
Oxide
M6
M5
r = 7.9
Oxide: 9.8um
r = 4.0
Substrate: 300um
r = 11.9, = 10 S/m
Ansoft High Frequency Structure Simulator v9 User’s Guide
Substrate
10.1-1
10.1
Example – Silicon Spiral Inductor
Getting Started
Launching Ansoft HFSS
1.
To access Ansoft HFSS, click the Microsoft Start button, select Programs, and
select the Ansoft > HFSS 9 program group. Click HFSS 9.
To set the tool options:
Note: In order to follow the steps outlined in this example, verify that the
following tool options are set :
1.
Select the menu item
Tools > Options > HFSS Options
2.
HFSS Options Window:
1.
Click the General tab
Use Wizards for data entry when creating new boundaries:
Checked
Duplicate boundaries with geometry: Checked
2.
Click the OK button
3.
Select the menu item
Tools > Options > 3D Modeler Options.
4.
3D Modeler Options Window:
1.
Click the Operation tab
Automatically cover closed polylines: Checked
2.
Click the Drawing tab
Edit property of new primitives: Checked
3.
Click the OK button
Setting Tool Options
Ansoft High Frequency Structure Simulator v9 User’s Guide
10.1-2