2024年4月12日发(作者：邢宛白)
Datasheet
Apreo 2 SEM
Unmatched versatility powered by ChemiSEM Technology
Resolve gray areas with the Thermo
Scientific Apreo 2 SEM, a high-
performance field emission gun (FEG) SEM
with unique, live elemental imaging and an
advanced, automated optics system that
enables you to focus on your research
rather than microscope performance.
The Thermo Scientific
™
Apreo
™
SEM has earned a reputation
for its versatility and high-quality imaging performance—
even on magnetic or other traditionally difficult samples. The
Apreo 2 SEM improves its impressive resolution specifications
and introduces live quantitative elemental mapping. A number
of other new features are designed to make its advanced
capabilities accessible for all users.
Multi-purpose labs see a wide spectrum of users looking to
image a wide range of sample types. Typically, this would
mean that users are required to navigate a range of alignments
before acquiring data. The Apreo 2 SEM introduces Smart
Align Technology to optimize image acquisition settings and
remove the need for user alignments. With the broad base of
alignment automation covered, you can focus on obtaining
data, as the system is always aligned and ready to image.
Thanks to Smart Align Technology and automated fine tuning
processes (FLASH), new users can easily access the high-end
performance of the Apreo 2 SEM.
The Apreo 2 SEM’s feature set also expands to analytical
capability by integrating Thermo Scientific
™
ChemiSEM
™
Technology into the main microscope UI. ChemiSEM
Technology revolutionizes and simplifies EDS analysis by fully
integrating SEM and EDS functions into a single, cohesive
user interface. Based on live quantification and building on
decades of expertise in EDS analysis, the technology provides
elemental information quickly and easily, guaranteeing reliable
results. And because ChemiSEM Technology is always on,
it can dramatically shorten time to results, highlight features
that would have previously gone unnoticed, and provide more
complete information.
P2P3P4
ChemiPhase image showing different phases present in a complex
inclusion in steel.
AgCuOSiCa
Microstructure of copper-silver alloy revealed with ChemiSEM technology.
Silicate contamination is immediately recognized when inspecting
samples with live compositional imaging via ChemiSEM.
Key features
All-round nanometer or sub-nanometer resolution
performance on materials ranging from nanoparticles,
powders, catalysts, and nanodevices to bulk magnetic
samples, even at long (10 mm) working distances
Extreme flexibility for handling a wide range of sample
types, including insulators, sensitive materials, or magnetic
samples, and for collecting the data that matters most to
your application
Less time spent on maintenance with an optics system that
aligns itself (SmartAlign Technology)
Elemental information at your fingertips with ChemiSEM
Technology; live quantitative elemental mapping for
unprecedented time to result and ease of use
Advanced automation including FLASH Technology for
automatic image fine tuning, undo, user guidance, maps
tiling, and stitching
5 µm
2 µm
The result is an easy-to-use system that allows you to focus on
discovery rather than manipulating multiple software packages.
The Apreo SEM’s unique Trinity in-column detection system
is present, but now with improved performance. The
Apreo 2 SEM remains the platform of choice for research on
nanoparticles, catalysts, powders, and nanodevices, thanks
to its innovative final lens design that does not compromise on
magnetic sample imaging performance. The electrostatic final
lens (available on Apreo 2 C and Apreo 2 S SEMs) enables
simultaneous in-column detection at high resolution, while
the Apreo 2 S SEM combines the electrostatic final lens with
magnetic immersion into a compound lens. The compound
final lens further boosts resolution performance, providing
a resolution of 0.9 nm at 1 kV without additional beam
deceleration, while offering unique options for signal filtering.
For the most challenging applications, the Apreo 2 SEM’s
charge mitigation routines can include optional low vacuum (up
to 500 Pa) to mitigate charge on any sample while providing
excellent resolution and large analytical currents with field-
proven through-the-lens differential pumping and dedicated
LoVac detectors.
All these capabilities are complemented by easy sample
handling and an easy-to-use microscope user interface,
saving time for novice and expert users alike. A customizable
user interface provides many options for user guidance,
automation, and remote operation. With unique technologies
like SmartAlign, FLASH, and ChemiSEM Technology added
to an already advanced microscope, the Apreo 2 SEM adds
additional flexibility to any lab while providing advanced imaging
capability for all users.
Electron optics
•
High-resolution field emission SEM column with:
–
High-stability Schottky field emission gun to provide
stable high-resolution analytical currents
–
Compound final lens: a combined electrostatic, field-
free magnetic and immersion magnetic objective lens
(optional)
–
60° objective lens geometry: allows tilting larger samples
–
Automated heated apertures to ensure cleanliness and
touch-free aperture changes
•
SmartAlign Technology: user-alignment-free technology
•
Through-the-lens differential pumping for low vacuum
(optional) reduces beam skirting for the most accurate
analysis and highest resolution
•
Beam deceleration with stage bias from -4,000 V to +600 V
•
Continuous beam current control and optimized
aperture angle
•
Double stage scanning deflection
•
Easy gun installation and
maintenance: auto bake-out, auto
start, no mechanical alignments
•
PivotBeam Mode for selected area
electron channeling, also known as
“rocking beam” mode (Apreo 2 S
model only)
•
Guaranteed minimum source lifetime: 24 months
Apreo 2 CApreo 2 S
Final lensElectrostaticCompound
High vacuum
30 kV (STEM) 0.7 nm0.7 nm
15 kV (BD)0.9 nm0.5 nm
15 kV (6.4 nA, WD 10 mm) 1.9 nm
1 kV1.2 nm0.9 nm
1 kV (BD) 1.0 nm0.8 nm
1 kV (BD, WD 10 mm) 1.0 nm
500 V (BD) 1.2 nm0.8 nm
200 V (BD) 1.2 nm
High vacuum (optional)
3 kV (30 Pa) 1.8 nm1.8 nm
15 kV (30 Pa) 1.2 nm1.2 nm
BD: beam deceleration mode. WD: working distance. Resolutions are at optimum working
distance unless specified otherwise. By default, upon final installation,the resolution is proven in
the systems acceptance test at 1 kV and 30 kV in highvacuum and with immersion switched on
if applicable.
Electron beam resolution
Electron beam parameter space
•
Beam current range: 1 pA to 50 nA
(400 nA configuration also available)
•
Accelerating voltage range: 200 V – 30 kV
•
Landing energy range: 20 eV – 30 keV
•
Max. horizontal field width: 3 mm at 10 mm WD
(corresponds to 29x minimum magnification)
Chamber
•
Inner width: 340 mm
•
Analytical working distance: 10 mm
•
Ports: 12
•
EDS take-off angle: 35°
•
Three simultaneous EDS detectors possible, two at 180°
•
Coplanar EDS/EBSD orthogonal to the tilt axis of the stage
Detectors
The Apreo 2 SEM detects up to four signals simultaneously
from any combination of the available detectors or detector
segments (optional):
•
Trinity Detection System (in-lens and in-column)
–
T1 segmented lower in-lens detector
–
T2 upper in-lens detector
–
T3 in-column detector (optional)
•
ETD—Everhart-Thornley SE detector
•
DBS—Retractable segmented under-the-lens BSED
(optional)
•
Low-vacuum SE detector (optional)
•
DBS-GAD—Lens-mounted gaseous analytical BSED
(optional)
•
STEM 3+—Retractable segmented detector
(BF, DF, HADF, HAADF) (optional)
•
IR-CCD
•
Thermo Scientific Nav-Cam
™
Camera (chamber-mounted)
ChemiSEM Technology (optional)
•
EDS detector size: 10, 30, or 60 mm²
•
Light element sensitivity down to beryllium
•
127 eV or 129 eV spectral resolution
•
Optional motorized slide available
Vacuum system
•
Complete oil-free vacuum system
•
1 × 240 l/s TMP
•
1 × PVP-scroll
•
2 × IGP
•
Chamber vacuum (high vacuum) <6.3 × 10-6 mbar
(after 12 hours pumping)
•
Evacuation time: ≤3.5 minute
•
Optional low-vacuum mode
•
10–500 Pa chamber pressure
•
Automatic Pressure Limiting Aperture (PLA) Loader
Sample holders
•
Standard multi-purpose holder uniquely mounts directly
onto the stage, hosts up to 18 standard stubs (ø12 mm),
three pre-tilted stubs, cross-section samples, and two pre-
tilted row-bar holders (optional) (38° and 90°). Tools are not
required to mount a sample.
•
Each optional row-bar accommodates 6 STEM grids
•
Wafer and custom holders (optional)
TypeEucentric goniometer stage,
5 axes motorized
XY110x110 mm
Repeatability <3.0 μm (@ 0° tilt)
Motorized Z65 mm
Rotationn × 360°
Tilt -15° / +90°
Max. sample heightClearance 85 mm to eucentric point
Max. sample weight 500 g in any stage position
Up to 5 kg at 0° tilt
Max. sample size122 mm diameter with full
X, Y, rotation (larger samples
possible with limited stage
travel or rotation)
System control
•
64-bit GUI with Windows 10, keyboard, optical mouse
•
24-inch LCD display, WUXGA 1920×1200
(second monitor optional)
•
Customizable graphical user interface,
with up to 4 simultaneously active views
•
FLASH automated image tuning for focus,
lens align, and stigmator
•
Image registration
•
Navigation montage
•
Image analysis software
•
Undo / Redo functionality
•
User guidance for basic operations / applications
•
Optional joystick
•
Optional manual user interface (knob board)
Image processor
•
Dwell time range from 25 ns to 25 ms/pixel
•
Up to 6144×4096 pixels
•
File type: TIFF (8-, 16-, 24-bit), JPEG or BMP
•
Single-frame or 4-view image display
•
SmartScan Mode (256-frame average or integration, line
integration and averaging, interlaced scanning)
•
DCFI (drift compensated frame integration) Mode
•
Digital image improvement and noise reduction filter
Accessories (optional)
•
Sample / chamber cleaning: CryoCleaner,
Warranty and Training
•
1 year warranty
•
Choice of service maintenance contracts
•
Choice of operation / application training contracts
Integrated Plasma Cleaner
•
Analysis: EDS, EBSD, WDS, CL, Raman
•
Thermo Scientific QuickLoader Load Lock for fast
™
sample transfer
•
Navigation: correlative navigation, Thermo Scientific Maps
™
Installation requirement
(Refer to preinstall guide for detailed data)
•
Power:
–
Voltage 100–240 V AC (-6%, +10%)
–
Frequency 50 or 60 Hz (±1%)
–
Consumption: <3.0 kVA for basic microscope
•
Earth resistance <0.1 Ω
•
Environment:
–
Temperature (20 ± 3)°C
–
Relative humidity below 80%
–
Stray AC magnetic fields <40 nT asynchronous, <100
Software tiling and stitching
•
Gas injection: up to 2 units (other accessories may limit
number of GIS available) for beam-induced deposition of:
–
Platinum
–
Tungsten
–
Carbon
•
Manipulators
•
Cryo-stage
•
Electrical probing / multi-probing stations
•
Electrostatic beam blanker
•
CleanConnect Sample Transfer Device
nT synchronous for line times, 20 ms (50 Hz mains) or
17 ms (60 Hz mains)
•
Minimum door size: 0.9 m wide × 1.9 m high
•
Weight: column console 980 kg
•
Dry nitrogen recommended for venting
•
Compressed air 4–6 bar, clean, dry and oil-free
•
System chiller
•
Acoustics: site survey required,
Software options
•
Maps Software for automatic large area acquisition using
tiling and stitching; correlative work
•
Thermo Scientific AutoScript
™
4 Software—Python-based
application programming interface
•
TopoMaps for image colorization, image analysis,
and 3D surface reconstruction
•
Advanced image analysis software
•
Remote control software
as acoustic spectrum relevant
•
Floor vibrations: site survey required,
as floor spectrum relevant
•
Optional active vibration isolation table
Documentation
•
Online user guidance
•
Operating instructions handbook
•
Online help
•
Prepared for RAPID (remote diagnostic support)
•
Free access to online resources for owners
Consumables (partial list)
•
Replacement Schottky electron source module
L earn more at /apreo
For research use only. Not for use in diagnostic procedures. For current certifications, visit /certifications
© 2023 Thermo Fisher Scientific Inc. All rights reserved. All trademarks are the property of Thermo Fisher Scientific
and its subsidiaries unless otherwise specified. DS0345-EN-07-2023
2024年4月12日发(作者：邢宛白)
Datasheet
Apreo 2 SEM
Unmatched versatility powered by ChemiSEM Technology
Resolve gray areas with the Thermo
Scientific Apreo 2 SEM, a high-
performance field emission gun (FEG) SEM
with unique, live elemental imaging and an
advanced, automated optics system that
enables you to focus on your research
rather than microscope performance.
The Thermo Scientific
™
Apreo
™
SEM has earned a reputation
for its versatility and high-quality imaging performance—
even on magnetic or other traditionally difficult samples. The
Apreo 2 SEM improves its impressive resolution specifications
and introduces live quantitative elemental mapping. A number
of other new features are designed to make its advanced
capabilities accessible for all users.
Multi-purpose labs see a wide spectrum of users looking to
image a wide range of sample types. Typically, this would
mean that users are required to navigate a range of alignments
before acquiring data. The Apreo 2 SEM introduces Smart
Align Technology to optimize image acquisition settings and
remove the need for user alignments. With the broad base of
alignment automation covered, you can focus on obtaining
data, as the system is always aligned and ready to image.
Thanks to Smart Align Technology and automated fine tuning
processes (FLASH), new users can easily access the high-end
performance of the Apreo 2 SEM.
The Apreo 2 SEM’s feature set also expands to analytical
capability by integrating Thermo Scientific
™
ChemiSEM
™
Technology into the main microscope UI. ChemiSEM
Technology revolutionizes and simplifies EDS analysis by fully
integrating SEM and EDS functions into a single, cohesive
user interface. Based on live quantification and building on
decades of expertise in EDS analysis, the technology provides
elemental information quickly and easily, guaranteeing reliable
results. And because ChemiSEM Technology is always on,
it can dramatically shorten time to results, highlight features
that would have previously gone unnoticed, and provide more
complete information.
P2P3P4
ChemiPhase image showing different phases present in a complex
inclusion in steel.
AgCuOSiCa
Microstructure of copper-silver alloy revealed with ChemiSEM technology.
Silicate contamination is immediately recognized when inspecting
samples with live compositional imaging via ChemiSEM.
Key features
All-round nanometer or sub-nanometer resolution
performance on materials ranging from nanoparticles,
powders, catalysts, and nanodevices to bulk magnetic
samples, even at long (10 mm) working distances
Extreme flexibility for handling a wide range of sample
types, including insulators, sensitive materials, or magnetic
samples, and for collecting the data that matters most to
your application
Less time spent on maintenance with an optics system that
aligns itself (SmartAlign Technology)
Elemental information at your fingertips with ChemiSEM
Technology; live quantitative elemental mapping for
unprecedented time to result and ease of use
Advanced automation including FLASH Technology for
automatic image fine tuning, undo, user guidance, maps
tiling, and stitching
5 µm
2 µm
The result is an easy-to-use system that allows you to focus on
discovery rather than manipulating multiple software packages.
The Apreo SEM’s unique Trinity in-column detection system
is present, but now with improved performance. The
Apreo 2 SEM remains the platform of choice for research on
nanoparticles, catalysts, powders, and nanodevices, thanks
to its innovative final lens design that does not compromise on
magnetic sample imaging performance. The electrostatic final
lens (available on Apreo 2 C and Apreo 2 S SEMs) enables
simultaneous in-column detection at high resolution, while
the Apreo 2 S SEM combines the electrostatic final lens with
magnetic immersion into a compound lens. The compound
final lens further boosts resolution performance, providing
a resolution of 0.9 nm at 1 kV without additional beam
deceleration, while offering unique options for signal filtering.
For the most challenging applications, the Apreo 2 SEM’s
charge mitigation routines can include optional low vacuum (up
to 500 Pa) to mitigate charge on any sample while providing
excellent resolution and large analytical currents with field-
proven through-the-lens differential pumping and dedicated
LoVac detectors.
All these capabilities are complemented by easy sample
handling and an easy-to-use microscope user interface,
saving time for novice and expert users alike. A customizable
user interface provides many options for user guidance,
automation, and remote operation. With unique technologies
like SmartAlign, FLASH, and ChemiSEM Technology added
to an already advanced microscope, the Apreo 2 SEM adds
additional flexibility to any lab while providing advanced imaging
capability for all users.
Electron optics
•
High-resolution field emission SEM column with:
–
High-stability Schottky field emission gun to provide
stable high-resolution analytical currents
–
Compound final lens: a combined electrostatic, field-
free magnetic and immersion magnetic objective lens
(optional)
–
60° objective lens geometry: allows tilting larger samples
–
Automated heated apertures to ensure cleanliness and
touch-free aperture changes
•
SmartAlign Technology: user-alignment-free technology
•
Through-the-lens differential pumping for low vacuum
(optional) reduces beam skirting for the most accurate
analysis and highest resolution
•
Beam deceleration with stage bias from -4,000 V to +600 V
•
Continuous beam current control and optimized
aperture angle
•
Double stage scanning deflection
•
Easy gun installation and
maintenance: auto bake-out, auto
start, no mechanical alignments
•
PivotBeam Mode for selected area
electron channeling, also known as
“rocking beam” mode (Apreo 2 S
model only)
•
Guaranteed minimum source lifetime: 24 months
Apreo 2 CApreo 2 S
Final lensElectrostaticCompound
High vacuum
30 kV (STEM) 0.7 nm0.7 nm
15 kV (BD)0.9 nm0.5 nm
15 kV (6.4 nA, WD 10 mm) 1.9 nm
1 kV1.2 nm0.9 nm
1 kV (BD) 1.0 nm0.8 nm
1 kV (BD, WD 10 mm) 1.0 nm
500 V (BD) 1.2 nm0.8 nm
200 V (BD) 1.2 nm
High vacuum (optional)
3 kV (30 Pa) 1.8 nm1.8 nm
15 kV (30 Pa) 1.2 nm1.2 nm
BD: beam deceleration mode. WD: working distance. Resolutions are at optimum working
distance unless specified otherwise. By default, upon final installation,the resolution is proven in
the systems acceptance test at 1 kV and 30 kV in highvacuum and with immersion switched on
if applicable.
Electron beam resolution
Electron beam parameter space
•
Beam current range: 1 pA to 50 nA
(400 nA configuration also available)
•
Accelerating voltage range: 200 V – 30 kV
•
Landing energy range: 20 eV – 30 keV
•
Max. horizontal field width: 3 mm at 10 mm WD
(corresponds to 29x minimum magnification)
Chamber
•
Inner width: 340 mm
•
Analytical working distance: 10 mm
•
Ports: 12
•
EDS take-off angle: 35°
•
Three simultaneous EDS detectors possible, two at 180°
•
Coplanar EDS/EBSD orthogonal to the tilt axis of the stage
Detectors
The Apreo 2 SEM detects up to four signals simultaneously
from any combination of the available detectors or detector
segments (optional):
•
Trinity Detection System (in-lens and in-column)
–
T1 segmented lower in-lens detector
–
T2 upper in-lens detector
–
T3 in-column detector (optional)
•
ETD—Everhart-Thornley SE detector
•
DBS—Retractable segmented under-the-lens BSED
(optional)
•
Low-vacuum SE detector (optional)
•
DBS-GAD—Lens-mounted gaseous analytical BSED
(optional)
•
STEM 3+—Retractable segmented detector
(BF, DF, HADF, HAADF) (optional)
•
IR-CCD
•
Thermo Scientific Nav-Cam
™
Camera (chamber-mounted)
ChemiSEM Technology (optional)
•
EDS detector size: 10, 30, or 60 mm²
•
Light element sensitivity down to beryllium
•
127 eV or 129 eV spectral resolution
•
Optional motorized slide available
Vacuum system
•
Complete oil-free vacuum system
•
1 × 240 l/s TMP
•
1 × PVP-scroll
•
2 × IGP
•
Chamber vacuum (high vacuum) <6.3 × 10-6 mbar
(after 12 hours pumping)
•
Evacuation time: ≤3.5 minute
•
Optional low-vacuum mode
•
10–500 Pa chamber pressure
•
Automatic Pressure Limiting Aperture (PLA) Loader
Sample holders
•
Standard multi-purpose holder uniquely mounts directly
onto the stage, hosts up to 18 standard stubs (ø12 mm),
three pre-tilted stubs, cross-section samples, and two pre-
tilted row-bar holders (optional) (38° and 90°). Tools are not
required to mount a sample.
•
Each optional row-bar accommodates 6 STEM grids
•
Wafer and custom holders (optional)
TypeEucentric goniometer stage,
5 axes motorized
XY110x110 mm
Repeatability <3.0 μm (@ 0° tilt)
Motorized Z65 mm
Rotationn × 360°
Tilt -15° / +90°
Max. sample heightClearance 85 mm to eucentric point
Max. sample weight 500 g in any stage position
Up to 5 kg at 0° tilt
Max. sample size122 mm diameter with full
X, Y, rotation (larger samples
possible with limited stage
travel or rotation)
System control
•
64-bit GUI with Windows 10, keyboard, optical mouse
•
24-inch LCD display, WUXGA 1920×1200
(second monitor optional)
•
Customizable graphical user interface,
with up to 4 simultaneously active views
•
FLASH automated image tuning for focus,
lens align, and stigmator
•
Image registration
•
Navigation montage
•
Image analysis software
•
Undo / Redo functionality
•
User guidance for basic operations / applications
•
Optional joystick
•
Optional manual user interface (knob board)
Image processor
•
Dwell time range from 25 ns to 25 ms/pixel
•
Up to 6144×4096 pixels
•
File type: TIFF (8-, 16-, 24-bit), JPEG or BMP
•
Single-frame or 4-view image display
•
SmartScan Mode (256-frame average or integration, line
integration and averaging, interlaced scanning)
•
DCFI (drift compensated frame integration) Mode
•
Digital image improvement and noise reduction filter
Accessories (optional)
•
Sample / chamber cleaning: CryoCleaner,
Warranty and Training
•
1 year warranty
•
Choice of service maintenance contracts
•
Choice of operation / application training contracts
Integrated Plasma Cleaner
•
Analysis: EDS, EBSD, WDS, CL, Raman
•
Thermo Scientific QuickLoader Load Lock for fast
™
sample transfer
•
Navigation: correlative navigation, Thermo Scientific Maps
™
Installation requirement
(Refer to preinstall guide for detailed data)
•
Power:
–
Voltage 100–240 V AC (-6%, +10%)
–
Frequency 50 or 60 Hz (±1%)
–
Consumption: <3.0 kVA for basic microscope
•
Earth resistance <0.1 Ω
•
Environment:
–
Temperature (20 ± 3)°C
–
Relative humidity below 80%
–
Stray AC magnetic fields <40 nT asynchronous, <100
Software tiling and stitching
•
Gas injection: up to 2 units (other accessories may limit
number of GIS available) for beam-induced deposition of:
–
Platinum
–
Tungsten
–
Carbon
•
Manipulators
•
Cryo-stage
•
Electrical probing / multi-probing stations
•
Electrostatic beam blanker
•
CleanConnect Sample Transfer Device
nT synchronous for line times, 20 ms (50 Hz mains) or
17 ms (60 Hz mains)
•
Minimum door size: 0.9 m wide × 1.9 m high
•
Weight: column console 980 kg
•
Dry nitrogen recommended for venting
•
Compressed air 4–6 bar, clean, dry and oil-free
•
System chiller
•
Acoustics: site survey required,
Software options
•
Maps Software for automatic large area acquisition using
tiling and stitching; correlative work
•
Thermo Scientific AutoScript
™
4 Software—Python-based
application programming interface
•
TopoMaps for image colorization, image analysis,
and 3D surface reconstruction
•
Advanced image analysis software
•
Remote control software
as acoustic spectrum relevant
•
Floor vibrations: site survey required,
as floor spectrum relevant
•
Optional active vibration isolation table
Documentation
•
Online user guidance
•
Operating instructions handbook
•
Online help
•
Prepared for RAPID (remote diagnostic support)
•
Free access to online resources for owners
Consumables (partial list)
•
Replacement Schottky electron source module
L earn more at /apreo
For research use only. Not for use in diagnostic procedures. For current certifications, visit /certifications
© 2023 Thermo Fisher Scientific Inc. All rights reserved. All trademarks are the property of Thermo Fisher Scientific
and its subsidiaries unless otherwise specified. DS0345-EN-07-2023