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半导体Reliability测试(SONY 英文版)

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2024年5月8日发(作者:贾宏阔)

CHAPTER

4-RELIABILITY TESTS AND

RELIABILITY PREDICTION

4

CHAPTER 4 - RELIABILITY TESTS AND RELIABILITY PREDICTION

4.1

4.2

Approach 120

What are 121

4.2.1

4.2.2

4.2.3

4.3

Reliability Test Significance and Purpose .......................................................121

Reliability Test Methods ...................................................................................121

Failure Criteria ...................................................................................................126

Accelerated Life Tests .....................................................................................................127

4.3.1

4.3.2

4.3.3

4.3.4

4.3.5

Purpose of Accelerated Life Tests ...................................................................127

Acceleration by Temperature ..........................................................................127

Acceleration by Temperature and Humidity ..................................................128

Acceleration by Voltage ...................................................................................128

Acceleration by Temperature Difference ........................................................129

4.4Reliability Evaluation 130

4.4.1

4.4.2

Test Element Group (TEG) ...............................................................................130

TEG for Reliability Evaluation ..........................................................................130

4.4.2.1

4.4.2.2

4.4.2.3

4.4.2.4

4.4.3

Process TEG ....................................................................................130

Circuit TEG ......................................................................................131

Bipolar Discrete TEG ......................................................................131

Package Evaluation TEG ................................................................132

Reliability Evaluation Methods Using TEG .....................................................134

4.4.3.1Wafer Level Reliability (WLR) ........................................................134

4.136

4.5.1Semiconductor Device Failure Rate ................................................................136

4.5.1.1

4.5.1.2

4.5.1.3

4.5.1.4

4.5.2

4.5.3

4.5.4

Semiconductor Device Failure Regions .......................................136

Initial Failures .................................................................................137

Random Failures ............................................................................139

Wear-out Failures ...........................................................................140

Acceleration Theory ..........................................................................................141

Stress Acceleration Tests .................................................................................143

Failure Rate Prediction Case Studies ..............................................................144

4.6

4.7

151

Reliability 152

118

2024年5月8日发(作者:贾宏阔)

CHAPTER

4-RELIABILITY TESTS AND

RELIABILITY PREDICTION

4

CHAPTER 4 - RELIABILITY TESTS AND RELIABILITY PREDICTION

4.1

4.2

Approach 120

What are 121

4.2.1

4.2.2

4.2.3

4.3

Reliability Test Significance and Purpose .......................................................121

Reliability Test Methods ...................................................................................121

Failure Criteria ...................................................................................................126

Accelerated Life Tests .....................................................................................................127

4.3.1

4.3.2

4.3.3

4.3.4

4.3.5

Purpose of Accelerated Life Tests ...................................................................127

Acceleration by Temperature ..........................................................................127

Acceleration by Temperature and Humidity ..................................................128

Acceleration by Voltage ...................................................................................128

Acceleration by Temperature Difference ........................................................129

4.4Reliability Evaluation 130

4.4.1

4.4.2

Test Element Group (TEG) ...............................................................................130

TEG for Reliability Evaluation ..........................................................................130

4.4.2.1

4.4.2.2

4.4.2.3

4.4.2.4

4.4.3

Process TEG ....................................................................................130

Circuit TEG ......................................................................................131

Bipolar Discrete TEG ......................................................................131

Package Evaluation TEG ................................................................132

Reliability Evaluation Methods Using TEG .....................................................134

4.4.3.1Wafer Level Reliability (WLR) ........................................................134

4.136

4.5.1Semiconductor Device Failure Rate ................................................................136

4.5.1.1

4.5.1.2

4.5.1.3

4.5.1.4

4.5.2

4.5.3

4.5.4

Semiconductor Device Failure Regions .......................................136

Initial Failures .................................................................................137

Random Failures ............................................................................139

Wear-out Failures ...........................................................................140

Acceleration Theory ..........................................................................................141

Stress Acceleration Tests .................................................................................143

Failure Rate Prediction Case Studies ..............................................................144

4.6

4.7

151

Reliability 152

118

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