2024年9月25日发(作者：咸寄松)

专利内容由知识产权出版社提供

专利名称：Alnoyokyokusankahakumakuomochiitashits…

发明人：OBARA YOZO,NOMURA AKIRA

申请号：JP7052082

申请日：19820428

公开号：JPH0244023B2

公开日：19901002

摘要：PURPOSE:To obtain easily a sensor element having low input impedance with

good yield, by covering the surface of an Al2O3 film of a humidity sensor element utilized

the Al2O3 film covering a pair of comb-shaped electrodes of an insulating substrate by

an electrolytically conductive thin metallic film made water impermeable by a specific

method. CONSTITUTION:A Ta thin film is sputtered on a ceramic substrate and a pair of

comb-shaped electrodes 2 is formed by chemical etching. Next, an thin Al film is vapor-

deposited on a part shown by a rough oblique line which is included the electrode 2 and

moreover, a terminal part is formed by vapor-depositing an Au 4. Then, anodic oxidation

of the thin Al film of the oblique line part is performed in common with the terminal part

4 and an thin Al2O3 film 3 is formed. Hereafter, the stabilizing heat treatment is carried

out and then, the hole sealing treatment is carried out in boiling water. After that, a

stainless metallic film 21 of Au, Ag, Cr, Ni etc. is formed on the surface of the film 3 by

vapor-deposition. Next, metallic particles which enter holes of the film 3 and short-circuit

neighboring two pieces 2a, 2b of the electrode 2 or lower the insulating resistance, are

evaporated by turning an electric current in <=10sec. at 130- 150V between the

electrodes 2, 2 and a water permeable metallic film 21 is formed. In this manner, a highly

sensitive element having a sensor characteristic stably is obtained.

申请人：HOKURIKU ELECT IND

更多信息请下载全文后查看

2024年9月25日发(作者：咸寄松)

专利内容由知识产权出版社提供

专利名称：Alnoyokyokusankahakumakuomochiitashits…

发明人：OBARA YOZO,NOMURA AKIRA

申请号：JP7052082

申请日：19820428

公开号：JPH0244023B2

公开日：19901002

摘要：PURPOSE:To obtain easily a sensor element having low input impedance with

good yield, by covering the surface of an Al2O3 film of a humidity sensor element utilized

the Al2O3 film covering a pair of comb-shaped electrodes of an insulating substrate by

an electrolytically conductive thin metallic film made water impermeable by a specific

method. CONSTITUTION:A Ta thin film is sputtered on a ceramic substrate and a pair of

comb-shaped electrodes 2 is formed by chemical etching. Next, an thin Al film is vapor-

deposited on a part shown by a rough oblique line which is included the electrode 2 and

moreover, a terminal part is formed by vapor-depositing an Au 4. Then, anodic oxidation

of the thin Al film of the oblique line part is performed in common with the terminal part

4 and an thin Al2O3 film 3 is formed. Hereafter, the stabilizing heat treatment is carried

out and then, the hole sealing treatment is carried out in boiling water. After that, a

stainless metallic film 21 of Au, Ag, Cr, Ni etc. is formed on the surface of the film 3 by

vapor-deposition. Next, metallic particles which enter holes of the film 3 and short-circuit

neighboring two pieces 2a, 2b of the electrode 2 or lower the insulating resistance, are

evaporated by turning an electric current in <=10sec. at 130- 150V between the

electrodes 2, 2 and a water permeable metallic film 21 is formed. In this manner, a highly

sensitive element having a sensor characteristic stably is obtained.

申请人：HOKURIKU ELECT IND

更多信息请下载全文后查看