2024年9月25日发(作者：咸寄松)
专利内容由知识产权出版社提供
专利名称：Alnoyokyokusankahakumakuomochiitashits…
发明人：OBARA YOZO,NOMURA AKIRA
申请号：JP7052082
申请日：19820428
公开号：JPH0244023B2
公开日：19901002
摘要：PURPOSE:To obtain easily a sensor element having low input impedance with
good yield, by covering the surface of an Al2O3 film of a humidity sensor element utilized
the Al2O3 film covering a pair of comb-shaped electrodes of an insulating substrate by
an electrolytically conductive thin metallic film made water impermeable by a specific
method. CONSTITUTION:A Ta thin film is sputtered on a ceramic substrate and a pair of
comb-shaped electrodes 2 is formed by chemical etching. Next, an thin Al film is vapor-
deposited on a part shown by a rough oblique line which is included the electrode 2 and
moreover, a terminal part is formed by vapor-depositing an Au 4. Then, anodic oxidation
of the thin Al film of the oblique line part is performed in common with the terminal part
4 and an thin Al2O3 film 3 is formed. Hereafter, the stabilizing heat treatment is carried
out and then, the hole sealing treatment is carried out in boiling water. After that, a
stainless metallic film 21 of Au, Ag, Cr, Ni etc. is formed on the surface of the film 3 by
vapor-deposition. Next, metallic particles which enter holes of the film 3 and short-circuit
neighboring two pieces 2a, 2b of the electrode 2 or lower the insulating resistance, are
evaporated by turning an electric current in <=10sec. at 130- 150V between the
electrodes 2, 2 and a water permeable metallic film 21 is formed. In this manner, a highly
sensitive element having a sensor characteristic stably is obtained.
申请人：HOKURIKU ELECT IND
更多信息请下载全文后查看
2024年9月25日发(作者：咸寄松)
专利内容由知识产权出版社提供
专利名称：Alnoyokyokusankahakumakuomochiitashits…
发明人：OBARA YOZO,NOMURA AKIRA
申请号：JP7052082
申请日：19820428
公开号：JPH0244023B2
公开日：19901002
摘要：PURPOSE:To obtain easily a sensor element having low input impedance with
good yield, by covering the surface of an Al2O3 film of a humidity sensor element utilized
the Al2O3 film covering a pair of comb-shaped electrodes of an insulating substrate by
an electrolytically conductive thin metallic film made water impermeable by a specific
method. CONSTITUTION:A Ta thin film is sputtered on a ceramic substrate and a pair of
comb-shaped electrodes 2 is formed by chemical etching. Next, an thin Al film is vapor-
deposited on a part shown by a rough oblique line which is included the electrode 2 and
moreover, a terminal part is formed by vapor-depositing an Au 4. Then, anodic oxidation
of the thin Al film of the oblique line part is performed in common with the terminal part
4 and an thin Al2O3 film 3 is formed. Hereafter, the stabilizing heat treatment is carried
out and then, the hole sealing treatment is carried out in boiling water. After that, a
stainless metallic film 21 of Au, Ag, Cr, Ni etc. is formed on the surface of the film 3 by
vapor-deposition. Next, metallic particles which enter holes of the film 3 and short-circuit
neighboring two pieces 2a, 2b of the electrode 2 or lower the insulating resistance, are
evaporated by turning an electric current in <=10sec. at 130- 150V between the
electrodes 2, 2 and a water permeable metallic film 21 is formed. In this manner, a highly
sensitive element having a sensor characteristic stably is obtained.
申请人：HOKURIKU ELECT IND
更多信息请下载全文后查看