2024年4月10日发(作者:郗迎天)
仅限公司内部使用 Confidential
GTWⅢ-5200U
安 装 要 领 书
由于本要领书属于微激光加工机的技术层面特别重要的秘密信息,因此禁止向客户发送即使是其中部分
的内容。但是本公司履行某种目的而判断为有必要向第三方公布秘密信息时,在事先获得书面许可的情
况下可以公布。
GTWIII安装要领书 BQN-G-14355-H
1/55
仅限公司内部使用 Confidential
目录
1.加工机、发振器的安装······················································P3
2.加工机的启动····································································P7
3.Camera安装角度调整······················································P10
4.功率传感器调整(零点调整)···········································P11
5.测高器调整········································································P12
6.Galvano安装····································································P13
7.冷却装置的启动·································································P14
8.发振器的启动····································································P17
9.Z轴补偿············································································P20
10.光路调整··········································································P22
11. Fθ透镜的安装······························································P35
12.加工机外罩(外壳)的安装·············································P36
13.排气导管的安装·······························································P36
14.Camera偏置调整····························································P37
(1)L侧偏置调整(调整MaskNo.1)
(2)R侧偏置调整
15.焦点调整··········································································P39
(1)焦点位置调整
(2)确认Power Sensor的中心位置
(3)MaskNo.2~11的调整
(4)左右能量平衡调整
(5)确认功率传感器误差
(6)调整Galvano补偿条件、对焦条件的准直透镜
16.Galvano补偿···································································P42
(1)输入放大器调整
(2)prgmake 制作
(3)M340Galvano补偿的执行
(4)实施准备画面的Galvano补偿、对焦2
17.确认脉冲监控功能···························································P44
18.确认圆整度测量、焦点裕度·············································P45
19.频率(周波数)特性试验·················································P46
20.XY加工台补偿································································P47
21.其他·················································································P48
22.参数的备份······································································P48
23.向名电发送数据·······························································P49
附录 ·····················································································P49
GTWIII安装要领书 BQN-G-14355-H
2/55
仅限公司内部使用 Confidential
1. 加工机、发振器的安装
(1) 加工机设置
作业前步骤
・
・
・
将水平尺的放置位置为加工机跟前的机械加工面。(参照下部照片)
从GTWⅢ开始需要使用M40板扳手。(特殊工具。与板金激光的NX相同。)
水平实施3点对中心。
此时,剥掉白色封条,放置水平尺。在作业后重新贴上封条。
※垫板下部地面如果粘有瓷砖、或实施了(厚的)涂装等时,请委托客户清除瓷砖等露出混凝土面。因为,长期
使用加工机后,会导致地面下沉。
(1-1)通过①、②进行调整,将①距地面高度调整为65mm。
(1-2)通过③、④进行横向的平行对准。
(1-3)在⑤附近使用千斤顶顶起②、④。
(1-4)仅调整⑤,在卸下千斤顶的情况下,保持①③方向略高(目标:4刻度)的状态。
(1-5)调整②、④,将纵、横方向水平都调整为1刻度值以内。
(1-6)将①~⑤都从上部开始安装防松螺母。
※调平螺丝、垫板的大小发生变更,请加以注意。
(2) 发振器设置
(2-1)使用铅锤,对准纵横方向的水平。
(2-2)设置时,使发振器TR侧的侧面对齐加工机面。
(2-3)将发振器-加工机间的距离设为50mm。
(2-4)在BM1上安装光路调整装夹具,微调整发振器位置、水平,使LD光进入BM1中心(±1mm)。
设置时对齐该面
水平尺安装位置
4
5
2
3
1
发振器
加工机
加工机
RES
50mm
发振器
TR侧
(3) 决定冷却装置、吸附装置、干燥空气等外围设备的位置。
注)由于真空吸附环状鼓风机的运行废热温度极高,因此应实施废热配管的隔热处理(客户委托),关于环状鼓风
机的放置场所应在可能的范围内作充分的考量。
→注意事项:当局部处于高温时,会给光学系统带来不良影响。请避免在BM1旁边设置废热管线。
(4) 当有L/UL时,进行临时放置。
GTWIII安装要领书 BQN-G-14355-H
3/55
仅限公司内部使用 Confidential
(5) 706GTWⅢ的情况
安装前面门的把手。在出厂时,把手粘贴于加工机内。
前面门把手的出厂状态 把手安装位置
(6) 拆下加工机各轴的固定金属零件
。 X,Y轴1处、Z轴2处。(共计4处)。
注)当在安装固定金属零件的状态下活动加工台时,有可能造成加工机骨架部分的重大损伤。
拆下跟前与右侧的伸缩罩的螺丝后,拆下X,Y轴的固定金属零件。
由于从加工机正面无法看到Z轴固定金属零件,因此请注意不要忘记将金属零件拆下。(Z轴光路里侧)
Z轴(L)固定金属零件
Z轴(R)固定金属零件
X轴固定金属零件
Y轴固定金属零件
①
根据粘贴于发振器共振器部分的封条(黄色封条)的顺序,旋松发振器底座4处锁定(PR侧2处、TR侧2
处)。
※顺序 TR(下侧)
2024年4月10日发(作者:郗迎天)
仅限公司内部使用 Confidential
GTWⅢ-5200U
安 装 要 领 书
由于本要领书属于微激光加工机的技术层面特别重要的秘密信息,因此禁止向客户发送即使是其中部分
的内容。但是本公司履行某种目的而判断为有必要向第三方公布秘密信息时,在事先获得书面许可的情
况下可以公布。
GTWIII安装要领书 BQN-G-14355-H
1/55
仅限公司内部使用 Confidential
目录
1.加工机、发振器的安装······················································P3
2.加工机的启动····································································P7
3.Camera安装角度调整······················································P10
4.功率传感器调整(零点调整)···········································P11
5.测高器调整········································································P12
6.Galvano安装····································································P13
7.冷却装置的启动·································································P14
8.发振器的启动····································································P17
9.Z轴补偿············································································P20
10.光路调整··········································································P22
11. Fθ透镜的安装······························································P35
12.加工机外罩(外壳)的安装·············································P36
13.排气导管的安装·······························································P36
14.Camera偏置调整····························································P37
(1)L侧偏置调整(调整MaskNo.1)
(2)R侧偏置调整
15.焦点调整··········································································P39
(1)焦点位置调整
(2)确认Power Sensor的中心位置
(3)MaskNo.2~11的调整
(4)左右能量平衡调整
(5)确认功率传感器误差
(6)调整Galvano补偿条件、对焦条件的准直透镜
16.Galvano补偿···································································P42
(1)输入放大器调整
(2)prgmake 制作
(3)M340Galvano补偿的执行
(4)实施准备画面的Galvano补偿、对焦2
17.确认脉冲监控功能···························································P44
18.确认圆整度测量、焦点裕度·············································P45
19.频率(周波数)特性试验·················································P46
20.XY加工台补偿································································P47
21.其他·················································································P48
22.参数的备份······································································P48
23.向名电发送数据·······························································P49
附录 ·····················································································P49
GTWIII安装要领书 BQN-G-14355-H
2/55
仅限公司内部使用 Confidential
1. 加工机、发振器的安装
(1) 加工机设置
作业前步骤
・
・
・
将水平尺的放置位置为加工机跟前的机械加工面。(参照下部照片)
从GTWⅢ开始需要使用M40板扳手。(特殊工具。与板金激光的NX相同。)
水平实施3点对中心。
此时,剥掉白色封条,放置水平尺。在作业后重新贴上封条。
※垫板下部地面如果粘有瓷砖、或实施了(厚的)涂装等时,请委托客户清除瓷砖等露出混凝土面。因为,长期
使用加工机后,会导致地面下沉。
(1-1)通过①、②进行调整,将①距地面高度调整为65mm。
(1-2)通过③、④进行横向的平行对准。
(1-3)在⑤附近使用千斤顶顶起②、④。
(1-4)仅调整⑤,在卸下千斤顶的情况下,保持①③方向略高(目标:4刻度)的状态。
(1-5)调整②、④,将纵、横方向水平都调整为1刻度值以内。
(1-6)将①~⑤都从上部开始安装防松螺母。
※调平螺丝、垫板的大小发生变更,请加以注意。
(2) 发振器设置
(2-1)使用铅锤,对准纵横方向的水平。
(2-2)设置时,使发振器TR侧的侧面对齐加工机面。
(2-3)将发振器-加工机间的距离设为50mm。
(2-4)在BM1上安装光路调整装夹具,微调整发振器位置、水平,使LD光进入BM1中心(±1mm)。
设置时对齐该面
水平尺安装位置
4
5
2
3
1
发振器
加工机
加工机
RES
50mm
发振器
TR侧
(3) 决定冷却装置、吸附装置、干燥空气等外围设备的位置。
注)由于真空吸附环状鼓风机的运行废热温度极高,因此应实施废热配管的隔热处理(客户委托),关于环状鼓风
机的放置场所应在可能的范围内作充分的考量。
→注意事项:当局部处于高温时,会给光学系统带来不良影响。请避免在BM1旁边设置废热管线。
(4) 当有L/UL时,进行临时放置。
GTWIII安装要领书 BQN-G-14355-H
3/55
仅限公司内部使用 Confidential
(5) 706GTWⅢ的情况
安装前面门的把手。在出厂时,把手粘贴于加工机内。
前面门把手的出厂状态 把手安装位置
(6) 拆下加工机各轴的固定金属零件
。 X,Y轴1处、Z轴2处。(共计4处)。
注)当在安装固定金属零件的状态下活动加工台时,有可能造成加工机骨架部分的重大损伤。
拆下跟前与右侧的伸缩罩的螺丝后,拆下X,Y轴的固定金属零件。
由于从加工机正面无法看到Z轴固定金属零件,因此请注意不要忘记将金属零件拆下。(Z轴光路里侧)
Z轴(L)固定金属零件
Z轴(R)固定金属零件
X轴固定金属零件
Y轴固定金属零件
①
根据粘贴于发振器共振器部分的封条(黄色封条)的顺序,旋松发振器底座4处锁定(PR侧2处、TR侧2
处)。
※顺序 TR(下侧)