2024年4月28日发(作者：锁娜)
MOTOROLA
Order this document
SUNSTAR传感与控制 / TEL: FAX: E-MAIL:szss20@
SEMICONDUCTOR TECHNICAL DATA
by MPX5100/D
IntegratedSiliconPressureSensor
On-ChipSignalConditioned,
TemperatureCompensated
andCalibrated
The MPX5100 series piezoresistive transducer is a state–of–the–art monolithic silicon
pressure sensor designed for a wide range of applications, but particularly those
employing a microcontroller or microprocessor with A/D inputs. This patented, single
element transducer combines advanced micromachining techniques, thin–film metalliza-
tion, and bipolar processing to provide an accurate, high level analog output signal that is
proportional to the applied pressure.
Features
•2.5% Maximum Error over 0° to 85°C
•Ideally suited for Microprocessor or Microcontroller–Based Systems
•Patented Silicon Shear Stress Strain Gauge
•Available in Absolute, Differential and Gauge Configurations
•Durable Epoxy Unibody Element
•Easy–to–Use Chip Carrier Option
V
S
MPX5100
SERIES
OPERATING OVERVIEW
INTEGRATED PRESSURE
SENSOR
0 to 100 kPa (0 to 14.5 psi)
15 to 115 kPa
(2.18 to 16.68 psi)
0.2 to 4.7 Volts Output
BASIC CHIP CARRIER
ELEMENT
CASE 867–08, STYLE 1
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
V
out
PINS 4, 5 AND 6 ARE NO CONNECTS
GND
DIFFERENTIAL PORT OPTION
CASE 867C–05, STYLE 1
NOTE: Pin 1 is the notched pin.
Figure 1. Fully Integrated Pressure Sensor Schematic
MAXIMUM RATINGS
(1)
Parametrics
Overpressure
(2)
(P1 > P2)
(P2 > P1)
Burst Pressure
(2)
(P1 > P2)
Storage Temperature
Operating Temperature
Symbol
P
max
P
burst
T
stg
T
A
Value
400
400
1000
–40° to +125°
–40° to +125°
Unit
kPa
kPa
°C
°C
PIN NUMBER
1
2
3
V
out
Gnd
V
S
4
5
6
N/C
N/C
N/C
NOTE: Pins 4, 5, and 6 are internal
device connections. Do not connect
to external circuitry or ground.
1.T
C
= 25°C unless otherwise noted.
re beyond the specified limits may cause permanent damage or degradation to the device.
REV 6
Motorola Sensor Device Data
SUNSTAR自动化 / TEL: FAX: E-MAIL:szss20@
©
Motorola, Inc. 1998
1
MPX5100SERIES
SUNSTAR传感与控制 / TEL: FAX: E-MAIL:szss20@
OPERATING CHARACTERISTICS
(V
S
= 5.0 Vdc, T
A
= 25°C unless otherwise noted, P1 > P2)
Characteristic
Pressure Range
(1)
Gauge, Differential: MPX5100D
Absolute: MPX5100A
Vacuum: MPX5100GV
(11)
Symbol
P
OP
Min
0
15
0
4.75
—
0.088
4.587
3.688
—
—
—
—
—
—
—
—
Typ
—
—
—
5.0
7.0
0.20
4.700
3.800
4.500
3.600
—
45
1.0
0.1
20
"0.5
Max
100
115
100
5.25
10
0.313
4.813
3.913
—
—
"2.5
—
—
—
—
—
Unit
kPa
Supply Voltage
(2)
Supply Current
Minimum Pressure Offset
(3)
@ V
S
= 5.0 Volts
Full Scale Output
(4)
@ V
S
= 5.0 Volts
Full Scale Span
(5)
@ V
S
= 5.0 Volts
Accuracy
(6)
Sensitivity
Response Time
(7)
Output Source Current at Full Scale Output
Warm–Up Time
(8)
Offset Stability
(9)
(0 to 85°C)
V
S
I
o
V
off
V
FSO
V
FSS
—
V/P
t
R
I
o+
—
—
Vdc
mAdc
Vdc
Vdc
Vdc
%V
FSS
mV/kPa
mS
mAdc
mSec
%V
FSS
Differential and Absolute(0 to 85°C)
Vacuum
(11)
Differential and Absolute(0 to 85°C)
Vacuum
(11)
Decoupling circuit shown in Figure 4 required to meet electrical specifications.
MECHANICAL CHARACTERISTICS
Characteristic
Weight, Basic Element (Case 867)
Common Mode Line Pressure
(10)
Symbol
—
—
Min
—
—
Typ
4.0
—
Max
—
690
Unit
Grams
kPa
NOTES:
1.1.0kPa (kiloPascal) equals 0.145 psi.
is ratiometric within this specified excitation range.
(V
off
) is defined as the output voltage at the minimum rated pressure.
Scale Output (V
FSO
) is defined as the output voltage at the maximum or full rated pressure.
Scale Span (V
FSS
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
cy (error budget) consists of the following:
•Linearity:Output deviation from a straight line relationship with pressure over the specified pressure range.
•Temperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
•Pressure Hysteresis:Output deviation at any pressure within the specified range, when this pressure is cycled to and from
minimum or maximum rated pressure at 25°C.
•TcSpan:Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
•TcOffset:Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative
to 25°C.
•Variation from Nominal:The variation from nominal values, for Offset or Full Scale Span, as a percent of V
FSS
at 25°C.
se Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
–up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.
stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
mode pressures beyond what is specified may result in leakage at the case–to–lead interface.
re Range: Vacuum sensor is rated to 100 kPa; part is tested to a vacuum pressure equivalent to 80 kPa.
2Motorola Sensor Device Data
SUNSTAR自动化 / TEL: FAX: E-MAIL:szss20@
2024年4月28日发(作者：锁娜)
MOTOROLA
Order this document
SUNSTAR传感与控制 / TEL: FAX: E-MAIL:szss20@
SEMICONDUCTOR TECHNICAL DATA
by MPX5100/D
IntegratedSiliconPressureSensor
On-ChipSignalConditioned,
TemperatureCompensated
andCalibrated
The MPX5100 series piezoresistive transducer is a state–of–the–art monolithic silicon
pressure sensor designed for a wide range of applications, but particularly those
employing a microcontroller or microprocessor with A/D inputs. This patented, single
element transducer combines advanced micromachining techniques, thin–film metalliza-
tion, and bipolar processing to provide an accurate, high level analog output signal that is
proportional to the applied pressure.
Features
•2.5% Maximum Error over 0° to 85°C
•Ideally suited for Microprocessor or Microcontroller–Based Systems
•Patented Silicon Shear Stress Strain Gauge
•Available in Absolute, Differential and Gauge Configurations
•Durable Epoxy Unibody Element
•Easy–to–Use Chip Carrier Option
V
S
MPX5100
SERIES
OPERATING OVERVIEW
INTEGRATED PRESSURE
SENSOR
0 to 100 kPa (0 to 14.5 psi)
15 to 115 kPa
(2.18 to 16.68 psi)
0.2 to 4.7 Volts Output
BASIC CHIP CARRIER
ELEMENT
CASE 867–08, STYLE 1
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
V
out
PINS 4, 5 AND 6 ARE NO CONNECTS
GND
DIFFERENTIAL PORT OPTION
CASE 867C–05, STYLE 1
NOTE: Pin 1 is the notched pin.
Figure 1. Fully Integrated Pressure Sensor Schematic
MAXIMUM RATINGS
(1)
Parametrics
Overpressure
(2)
(P1 > P2)
(P2 > P1)
Burst Pressure
(2)
(P1 > P2)
Storage Temperature
Operating Temperature
Symbol
P
max
P
burst
T
stg
T
A
Value
400
400
1000
–40° to +125°
–40° to +125°
Unit
kPa
kPa
°C
°C
PIN NUMBER
1
2
3
V
out
Gnd
V
S
4
5
6
N/C
N/C
N/C
NOTE: Pins 4, 5, and 6 are internal
device connections. Do not connect
to external circuitry or ground.
1.T
C
= 25°C unless otherwise noted.
re beyond the specified limits may cause permanent damage or degradation to the device.
REV 6
Motorola Sensor Device Data
SUNSTAR自动化 / TEL: FAX: E-MAIL:szss20@
©
Motorola, Inc. 1998
1
MPX5100SERIES
SUNSTAR传感与控制 / TEL: FAX: E-MAIL:szss20@
OPERATING CHARACTERISTICS
(V
S
= 5.0 Vdc, T
A
= 25°C unless otherwise noted, P1 > P2)
Characteristic
Pressure Range
(1)
Gauge, Differential: MPX5100D
Absolute: MPX5100A
Vacuum: MPX5100GV
(11)
Symbol
P
OP
Min
0
15
0
4.75
—
0.088
4.587
3.688
—
—
—
—
—
—
—
—
Typ
—
—
—
5.0
7.0
0.20
4.700
3.800
4.500
3.600
—
45
1.0
0.1
20
"0.5
Max
100
115
100
5.25
10
0.313
4.813
3.913
—
—
"2.5
—
—
—
—
—
Unit
kPa
Supply Voltage
(2)
Supply Current
Minimum Pressure Offset
(3)
@ V
S
= 5.0 Volts
Full Scale Output
(4)
@ V
S
= 5.0 Volts
Full Scale Span
(5)
@ V
S
= 5.0 Volts
Accuracy
(6)
Sensitivity
Response Time
(7)
Output Source Current at Full Scale Output
Warm–Up Time
(8)
Offset Stability
(9)
(0 to 85°C)
V
S
I
o
V
off
V
FSO
V
FSS
—
V/P
t
R
I
o+
—
—
Vdc
mAdc
Vdc
Vdc
Vdc
%V
FSS
mV/kPa
mS
mAdc
mSec
%V
FSS
Differential and Absolute(0 to 85°C)
Vacuum
(11)
Differential and Absolute(0 to 85°C)
Vacuum
(11)
Decoupling circuit shown in Figure 4 required to meet electrical specifications.
MECHANICAL CHARACTERISTICS
Characteristic
Weight, Basic Element (Case 867)
Common Mode Line Pressure
(10)
Symbol
—
—
Min
—
—
Typ
4.0
—
Max
—
690
Unit
Grams
kPa
NOTES:
1.1.0kPa (kiloPascal) equals 0.145 psi.
is ratiometric within this specified excitation range.
(V
off
) is defined as the output voltage at the minimum rated pressure.
Scale Output (V
FSO
) is defined as the output voltage at the maximum or full rated pressure.
Scale Span (V
FSS
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
cy (error budget) consists of the following:
•Linearity:Output deviation from a straight line relationship with pressure over the specified pressure range.
•Temperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
•Pressure Hysteresis:Output deviation at any pressure within the specified range, when this pressure is cycled to and from
minimum or maximum rated pressure at 25°C.
•TcSpan:Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
•TcOffset:Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative
to 25°C.
•Variation from Nominal:The variation from nominal values, for Offset or Full Scale Span, as a percent of V
FSS
at 25°C.
se Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
–up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.
stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
mode pressures beyond what is specified may result in leakage at the case–to–lead interface.
re Range: Vacuum sensor is rated to 100 kPa; part is tested to a vacuum pressure equivalent to 80 kPa.
2Motorola Sensor Device Data
SUNSTAR自动化 / TEL: FAX: E-MAIL:szss20@