2024年5月27日发(作者：贡海)
BEST KNOWN METHODS
Transpector® XPR3 Gas Analysis System
DESCRIPTION
The Transpector XPR3 is a third-generation, quadrupole-based
residual gas analyzer that operates at PVD process pressures and
is the first process monitor with an Electron Multiplier (EM) that can
operate at 10 mTorr operating pressures. The XPR3 does not
require the large differential pumping system normally required for
PVD process monitoring. The XPR3 can operate up to 20 mTorr,
and it is linear at pressures up to 10 mTorr. The XPR3 measures
major components and impurities common in a process with a
10 ppm detection limit.
Using these recommended Best Known Methods will provide you
with a reliable Transpector XPR3 for process monitoring a high
pressure application.
reaching the ion source plate, which prevents any material from
depositing on the XPR3 sensor. A heating jacket is provided with
the XPR3 package and should be installed over the interlock
weldment such that the cable is oriented as seen in Figure 1.
Tool
Interlock Weldment
IPN 914-416-G1
7.2 in.(18 cm)
Manual
8.3 in.(21 cm)
Air Operated
Transpector XPR 3
7.7 - 8.8 in.
(19.6 - 22.3 cm)
Pirani Gauge
Heater
IPN 918-401-P1
15.3 in. (38.7 cm)
The 90 Isolation Valve is
located between the Tool
Chamber and the XPR3
(INFICON supplied option)
o
XPR3 APPLICATIONS
The XPR3 utilizes a High Pressure MicroChannel Plate Electron
Multiplier (HPEM). The HPEM can be used at lower pressures,
such as background pressures, and it can also be used at higher
pressures, such as process pressures.
The XPR3 is typically used for process monitoring of PVD
applications. These applications normally operate in the mTorr
range with backgrounds from 1e-6 to 1e-9 Torr. While the XPR3
can be used for other applications where the process pressure is
less than 10 mTorr, precautions should be used. Applications that
have high levels of hydrocarbon contamination or a significant
amount of fluorines, chlorines or halogens are inappropriate for the
XPR3.
Figure 1
Once the XPR3 sensor, electronics module, valve, and Pirani
gauge are installed, the valve should be opened to allow the XPR3
to obtain high vacuum. It is strongly recommended that the XPR3
be kept under high vacuum conditions for at least eight hours
before the filament is turned on. It is also recommended that the
XPR3 be baked out with the supplied heating jacket (which
operates at 150 °C) for a period of at least eight hours. This eight
hour minimum bake out is required to reduce residual water vapor
levels that may be higher due to local surface outgassing effects.
These recommendations should be followed whenever the XPR3
sensor is exposed to atmosphere for long periods of time and will
serve to increase sensor life.
PHYSICAL INSTALLATION
The XPR3 package includes an interlock weldment approximately
3.6" (91.44 mm) long with a VCR connection tube for the Pirani
gauge. The Pirani gauge is used for turning the XPR3 filament off
above 20 mTorr and optionally turning the filament back on at
pressures below the turn off point.
The XPR3 sensor mounts within the interlock weldment. The
weldment must be mounted to the process chamber via a 90° valve
(or mitered elbow). This prevents any line of sight plasma from
1 of 6
Transpector XPR3 Best Known Methods
PIRANI SET-UP
Clicking first on the XPR3 icon from the TWare32™ main screen to
reach the Sensor Properties screen, and then selecting the TSP
User Settings tab will display the Pirani gauge set points. The
Pressure Interlock Functions dialog is shown in Figure 2. The
Emission OFF Pirani Interlock function is automatically enabled
and cannot be disabled. The default (and maximum) value for
emission off is 20 mTorr. The Pirani Auto Emission ON is
disabled by default, but can be enabled by checking the box and
assigning a value less than or equal to 3.00e-3 Torr.
LEAK DETECTION
Using TWare32, there is no recipe required for operating in Leak
Mode. Select the Leak Mode icon as pictured above to default to
sampling Helium (Mass 4) over time. When leak checking a
vacuum system that has a pressure of 1x10
-5
Torr or lower, the
HPEM should be used. The HPEM voltage that is necessary is
based on the level of the leak that you are searching for. Adjust the
HPEM voltage so that the Helium (Mass 4) signal can be observed,
but do not exceed an intensity of 1e-7 amps.
RECIPE GENERATION
Using the XPR3 for background monitoring or process monitoring
is accomplished by creating and running a recipe. The XPR3 user
can generate these recipes, or sample recipes can be obtained
from INFICON. The recipe file sizes are rather small (about 1 Kb)
and can easily be e-mailed if desired. Please contact INFICON by
phone at (315) 434-1128 or by e-mail at reachus@.
Figure 2
USING THE XPR3
Once the sensor has been conditioned, by baking it out and then
keeping it under vacuum, the emission can be safely turned on. At
this point, typical uses for the XPR3 would be leak detection,
background monitoring, and process monitoring. The following are
recommended parameters when operating the XPR3 in any of
these applications.
These settings are reached from the Recipe Editor by choosing
Recipe Editor >> Sensor State >> Advanced Functions (see
Figure 3).
2024年5月27日发(作者：贡海)
BEST KNOWN METHODS
Transpector® XPR3 Gas Analysis System
DESCRIPTION
The Transpector XPR3 is a third-generation, quadrupole-based
residual gas analyzer that operates at PVD process pressures and
is the first process monitor with an Electron Multiplier (EM) that can
operate at 10 mTorr operating pressures. The XPR3 does not
require the large differential pumping system normally required for
PVD process monitoring. The XPR3 can operate up to 20 mTorr,
and it is linear at pressures up to 10 mTorr. The XPR3 measures
major components and impurities common in a process with a
10 ppm detection limit.
Using these recommended Best Known Methods will provide you
with a reliable Transpector XPR3 for process monitoring a high
pressure application.
reaching the ion source plate, which prevents any material from
depositing on the XPR3 sensor. A heating jacket is provided with
the XPR3 package and should be installed over the interlock
weldment such that the cable is oriented as seen in Figure 1.
Tool
Interlock Weldment
IPN 914-416-G1
7.2 in.(18 cm)
Manual
8.3 in.(21 cm)
Air Operated
Transpector XPR 3
7.7 - 8.8 in.
(19.6 - 22.3 cm)
Pirani Gauge
Heater
IPN 918-401-P1
15.3 in. (38.7 cm)
The 90 Isolation Valve is
located between the Tool
Chamber and the XPR3
(INFICON supplied option)
o
XPR3 APPLICATIONS
The XPR3 utilizes a High Pressure MicroChannel Plate Electron
Multiplier (HPEM). The HPEM can be used at lower pressures,
such as background pressures, and it can also be used at higher
pressures, such as process pressures.
The XPR3 is typically used for process monitoring of PVD
applications. These applications normally operate in the mTorr
range with backgrounds from 1e-6 to 1e-9 Torr. While the XPR3
can be used for other applications where the process pressure is
less than 10 mTorr, precautions should be used. Applications that
have high levels of hydrocarbon contamination or a significant
amount of fluorines, chlorines or halogens are inappropriate for the
XPR3.
Figure 1
Once the XPR3 sensor, electronics module, valve, and Pirani
gauge are installed, the valve should be opened to allow the XPR3
to obtain high vacuum. It is strongly recommended that the XPR3
be kept under high vacuum conditions for at least eight hours
before the filament is turned on. It is also recommended that the
XPR3 be baked out with the supplied heating jacket (which
operates at 150 °C) for a period of at least eight hours. This eight
hour minimum bake out is required to reduce residual water vapor
levels that may be higher due to local surface outgassing effects.
These recommendations should be followed whenever the XPR3
sensor is exposed to atmosphere for long periods of time and will
serve to increase sensor life.
PHYSICAL INSTALLATION
The XPR3 package includes an interlock weldment approximately
3.6" (91.44 mm) long with a VCR connection tube for the Pirani
gauge. The Pirani gauge is used for turning the XPR3 filament off
above 20 mTorr and optionally turning the filament back on at
pressures below the turn off point.
The XPR3 sensor mounts within the interlock weldment. The
weldment must be mounted to the process chamber via a 90° valve
(or mitered elbow). This prevents any line of sight plasma from
1 of 6
Transpector XPR3 Best Known Methods
PIRANI SET-UP
Clicking first on the XPR3 icon from the TWare32™ main screen to
reach the Sensor Properties screen, and then selecting the TSP
User Settings tab will display the Pirani gauge set points. The
Pressure Interlock Functions dialog is shown in Figure 2. The
Emission OFF Pirani Interlock function is automatically enabled
and cannot be disabled. The default (and maximum) value for
emission off is 20 mTorr. The Pirani Auto Emission ON is
disabled by default, but can be enabled by checking the box and
assigning a value less than or equal to 3.00e-3 Torr.
LEAK DETECTION
Using TWare32, there is no recipe required for operating in Leak
Mode. Select the Leak Mode icon as pictured above to default to
sampling Helium (Mass 4) over time. When leak checking a
vacuum system that has a pressure of 1x10
-5
Torr or lower, the
HPEM should be used. The HPEM voltage that is necessary is
based on the level of the leak that you are searching for. Adjust the
HPEM voltage so that the Helium (Mass 4) signal can be observed,
but do not exceed an intensity of 1e-7 amps.
RECIPE GENERATION
Using the XPR3 for background monitoring or process monitoring
is accomplished by creating and running a recipe. The XPR3 user
can generate these recipes, or sample recipes can be obtained
from INFICON. The recipe file sizes are rather small (about 1 Kb)
and can easily be e-mailed if desired. Please contact INFICON by
phone at (315) 434-1128 or by e-mail at reachus@.
Figure 2
USING THE XPR3
Once the sensor has been conditioned, by baking it out and then
keeping it under vacuum, the emission can be safely turned on. At
this point, typical uses for the XPR3 would be leak detection,
background monitoring, and process monitoring. The following are
recommended parameters when operating the XPR3 in any of
these applications.
These settings are reached from the Recipe Editor by choosing
Recipe Editor >> Sensor State >> Advanced Functions (see
Figure 3).