2024年4月6日发(作者：练天亦)
元器件交易网
Low Cost, Low Noise ±1 g
FEATURES
Low cost
Resolution better than 1 milli-g
Dual axis accelerometer fabricated on a monolithic
CMOS IC
On chip mixed signal processing
No moving parts; >50,000 g shock survival rating
5mm X 5mm X 1.55mm LCC package
2.7V to 3.6V single supply continuous operation
Compensated for Sensitivity over temperature
Ultra low initial Zero-g Offset
No adjustment needed outside
APPLICATIONS
Tilt and motion sensing in cost-sensitive applications
Smart handheld devices
Computer security
Input devices
Pedometers and activity monitors
Gaming controllers
Toys and entertainment products
GENERAL DESCRIPTION
The MXA6500G/M is a low cost, dual axis accelerometer
fabricated on a standard, submicron CMOS process. It is a
complete sensing system with on-chip mixed signal
processing. The MXA6500G/M measures acceleration with
a full-scale range of ±1 g and a sensitivity of 500mV/g @3V
at 25
°C
. It can measure both dynamic acceleration (e.g.
vibration) and static acceleration (e.g. gravity). The
MXA6500G/M design is based on heat convection and
requires no solid proof mass. This eliminates stiction and
particle problems associated with competitive devices and
provides shock survival greater than 50,000 g, leading to
significantly lower failure rate and lower loss due to handling
during assembly and at customer field application.
TP
Dual Axis Accelerometer with
Absolute Analog Outputs
MXA6500G/M
VDD
TEMP
Internal
Oscillator
VREF
Temperature
Sensor
TEMP
CLK
PD
CLK
Heater
Control
Coarse
Gain Adj.
Fine Gain
Adj.
No
Connection
Vref
Low Pass
Buf.
Filter
CLK
X aixs
CLK
Coarse
Gain Adj.
Temp
Comp.
A/D
D/A
CLK
Vref
Xout
CLKTEMP
CLK
Fine Gain
Adj.
Temp
Comp.
No
Connection
Y aixs
Acceleration
Sensor
CLK
A/D
CLK
D/A
CLK
Low Pass
Buf.
Filter
CLK
Yout
CLK
TEMP
GND
MXA6500G/M FUNCTIONAL BLOCK DIAGRAM
The max noise floor is 1 mg/
Hz
allowing signals below
1 milli-g to be resolved at 1 Hz bandwidth. The
MXA6500G/M is packaged in a hermetically sealed LCC
surface mount package (5 mm x 5 mm x 1.55 mm height)
.
It is operational over a -40
°C
to 85
°C(M) and 0°C to 70°C(G)
temperature range.
Information furnished by MEMSIC is believed to be accurate and reliable. However,
no responsibility is assumed by MEMSIC for its use, nor for any infringements of
patents or other rights of third parties which may result from its use. No license is
granted by implication or otherwise under any patent or patent rights of MEMSIC.
©MEMSIC, Inc.
800 Turnpike St., Suite 202, North Andover, MA 01845
Tel: 978.738.0900 Fax: 978.738.0196
MEMSIC MXA6500G/M Rev.B Page 1 of 6 3/22/2005
元器件交易网
MXA6500G/M SPECIFICATIONS
(Measurements @ 25°C, Acceleration = 0 g unless otherwise noted; V
DD
= 3.0V unless otherwise
specified)
Parameter
SENSOR INPUT
Measurement Range
1
Nonlinearity
Alignment Error
2
Alignment Error
Conditions
Each Axis
MXA6500G MXA6500M
Units
Min Typ Max Min Typ Max
±1.0
±1.0
g
Cross Axis Sensitivity
3
SENSITIVITY
Sensitivity,
Sensitivity
Change over
Temperature
4
ZERO g BIAS LEVEL
0 g Offset
0 g Offset
0 g Offset vs.
Temperature
4
NOISE PERFORMANCE
Noise Density, rms
@25°C
FREQUENCY RESPONSE
3dB Bandwidth
POWER SUPPLY
Operating Voltage Range
Quiescent Supply Current @3.0V supply
OUTPUTS
PERFORMANCE
@3.0V supply Output High Voltage
Output Low Voltage
Source or sink @ Current
5
3.0V-3.6V Supply
Turn-On Time
@3.0V supply
TEMPERATURE RANGE
Operating Range
NOTES
Best fit straight 0.5 1.0 0.5 1.0 % of FS
line
degrees
±1.0 ±1.0
X Sensor to Y 0.01 0.01 degrees
Sensor
%
±1.5 ±1.5
Each Axis
475 500 525 475 500 525 mV/g
V
DD
= 3.0V
15 20 %
Delta from 25°C
Each Axis
V
1.30
1.25
1.20
1.30
1.25
1.20
VDD = 3.0V
g
0.10
0.00
-0.10
0.10
0.00
-0.10
1.5 1.5
Delta from 25°C mg/°C
15
2.7
2.30
0.4
17
2.0
75
1.0
19
3.6
0.20
100
15
2.7
2.30
0.4
17
2.0
75
1.0
19
3.6
0.20
100
0
+70
-40
+85
mg/
Hz
Hz
V
mA
V
V
uA
mS
°C
1
2
Guaranteed by measurement of initial offset and sensitivity.
Alignment error is specified as the angle between the true and indicated axis of
sensitivity.
3
Cross axis sensitivity is the algebraic sum of the alignment and the inherent
sensitivity errors.
Defined as the output change from ambient to maximum temperature or ambient to
minimum temperature.
5
4
Output settled to within ±17mg
.
MEMSIC MXA6500G/M Rev.B
Page 2 of 6
3/22/2005
2024年4月6日发(作者：练天亦)
元器件交易网
Low Cost, Low Noise ±1 g
FEATURES
Low cost
Resolution better than 1 milli-g
Dual axis accelerometer fabricated on a monolithic
CMOS IC
On chip mixed signal processing
No moving parts; >50,000 g shock survival rating
5mm X 5mm X 1.55mm LCC package
2.7V to 3.6V single supply continuous operation
Compensated for Sensitivity over temperature
Ultra low initial Zero-g Offset
No adjustment needed outside
APPLICATIONS
Tilt and motion sensing in cost-sensitive applications
Smart handheld devices
Computer security
Input devices
Pedometers and activity monitors
Gaming controllers
Toys and entertainment products
GENERAL DESCRIPTION
The MXA6500G/M is a low cost, dual axis accelerometer
fabricated on a standard, submicron CMOS process. It is a
complete sensing system with on-chip mixed signal
processing. The MXA6500G/M measures acceleration with
a full-scale range of ±1 g and a sensitivity of 500mV/g @3V
at 25
°C
. It can measure both dynamic acceleration (e.g.
vibration) and static acceleration (e.g. gravity). The
MXA6500G/M design is based on heat convection and
requires no solid proof mass. This eliminates stiction and
particle problems associated with competitive devices and
provides shock survival greater than 50,000 g, leading to
significantly lower failure rate and lower loss due to handling
during assembly and at customer field application.
TP
Dual Axis Accelerometer with
Absolute Analog Outputs
MXA6500G/M
VDD
TEMP
Internal
Oscillator
VREF
Temperature
Sensor
TEMP
CLK
PD
CLK
Heater
Control
Coarse
Gain Adj.
Fine Gain
Adj.
No
Connection
Vref
Low Pass
Buf.
Filter
CLK
X aixs
CLK
Coarse
Gain Adj.
Temp
Comp.
A/D
D/A
CLK
Vref
Xout
CLKTEMP
CLK
Fine Gain
Adj.
Temp
Comp.
No
Connection
Y aixs
Acceleration
Sensor
CLK
A/D
CLK
D/A
CLK
Low Pass
Buf.
Filter
CLK
Yout
CLK
TEMP
GND
MXA6500G/M FUNCTIONAL BLOCK DIAGRAM
The max noise floor is 1 mg/
Hz
allowing signals below
1 milli-g to be resolved at 1 Hz bandwidth. The
MXA6500G/M is packaged in a hermetically sealed LCC
surface mount package (5 mm x 5 mm x 1.55 mm height)
.
It is operational over a -40
°C
to 85
°C(M) and 0°C to 70°C(G)
temperature range.
Information furnished by MEMSIC is believed to be accurate and reliable. However,
no responsibility is assumed by MEMSIC for its use, nor for any infringements of
patents or other rights of third parties which may result from its use. No license is
granted by implication or otherwise under any patent or patent rights of MEMSIC.
©MEMSIC, Inc.
800 Turnpike St., Suite 202, North Andover, MA 01845
Tel: 978.738.0900 Fax: 978.738.0196
MEMSIC MXA6500G/M Rev.B Page 1 of 6 3/22/2005
元器件交易网
MXA6500G/M SPECIFICATIONS
(Measurements @ 25°C, Acceleration = 0 g unless otherwise noted; V
DD
= 3.0V unless otherwise
specified)
Parameter
SENSOR INPUT
Measurement Range
1
Nonlinearity
Alignment Error
2
Alignment Error
Conditions
Each Axis
MXA6500G MXA6500M
Units
Min Typ Max Min Typ Max
±1.0
±1.0
g
Cross Axis Sensitivity
3
SENSITIVITY
Sensitivity,
Sensitivity
Change over
Temperature
4
ZERO g BIAS LEVEL
0 g Offset
0 g Offset
0 g Offset vs.
Temperature
4
NOISE PERFORMANCE
Noise Density, rms
@25°C
FREQUENCY RESPONSE
3dB Bandwidth
POWER SUPPLY
Operating Voltage Range
Quiescent Supply Current @3.0V supply
OUTPUTS
PERFORMANCE
@3.0V supply Output High Voltage
Output Low Voltage
Source or sink @ Current
5
3.0V-3.6V Supply
Turn-On Time
@3.0V supply
TEMPERATURE RANGE
Operating Range
NOTES
Best fit straight 0.5 1.0 0.5 1.0 % of FS
line
degrees
±1.0 ±1.0
X Sensor to Y 0.01 0.01 degrees
Sensor
%
±1.5 ±1.5
Each Axis
475 500 525 475 500 525 mV/g
V
DD
= 3.0V
15 20 %
Delta from 25°C
Each Axis
V
1.30
1.25
1.20
1.30
1.25
1.20
VDD = 3.0V
g
0.10
0.00
-0.10
0.10
0.00
-0.10
1.5 1.5
Delta from 25°C mg/°C
15
2.7
2.30
0.4
17
2.0
75
1.0
19
3.6
0.20
100
15
2.7
2.30
0.4
17
2.0
75
1.0
19
3.6
0.20
100
0
+70
-40
+85
mg/
Hz
Hz
V
mA
V
V
uA
mS
°C
1
2
Guaranteed by measurement of initial offset and sensitivity.
Alignment error is specified as the angle between the true and indicated axis of
sensitivity.
3
Cross axis sensitivity is the algebraic sum of the alignment and the inherent
sensitivity errors.
Defined as the output change from ambient to maximum temperature or ambient to
minimum temperature.
5
4
Output settled to within ±17mg
.
MEMSIC MXA6500G/M Rev.B
Page 2 of 6
3/22/2005